Process for the production of semiconductor materials

Details Process for the production of semiconductor materials Process for the production of semiconductor materials

1986-07-28

1988-02-09

Childs, Sadie L.

Fishing, trapping, and vermin destroying

118724, 118725, 427 52, 4272481, 427255, 427 51, B05D 314

Patent

active

047241608

ABSTRACT:
An improvement in a process for the production of semiconductor materials from the vapor decomposition of a precursor compound of the desired semiconductor material and the deposition of the desired semiconductor material. The improvement comprises the heating of the exterior surface of a metallic enclosure of a reactor to facilitate preheating thin rods of the semiconductor material, the rods supplying the heat for decomposition and acting as a substrate for deposition, to a temperature of about 250.degree. C. to render the thin rods conductive enough to effectively pass an electric current.

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