Process for the production of relief structures using a negative

Details Process for the production of relief structures using a negative Process for the production of relief structures using a negative

1992-09-17

1994-04-05

McCamish, Marion E.

Radiation imagery chemistry: process, composition, or product th

Imaged product

Including resin or synthetic polymer

430325, 430330, G03F 730, G03F 740

Patent

active

053003802

ABSTRACT:
The present invention relates to a negative photoresist consisting essentially of a process for the production of relief structures using

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