Process for the production of epitaxial layers on monocrystallin

Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal

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148172, 427 86, H01L 21208

Patent

active

041151623

ABSTRACT:
A process or method for the production of epitaxial layers on a monocrystalline substrate by moving a melt on a surface of the substrate, depositing the layer and then removing the remaining melt from the substrate characterized by the substrate being a crystal having two boundary edges, which are parallel to one another and in which no preferred edge growth occurs in a direction running at right angles to the boundary edges and pointing outward from the interior of the substrate crystal so that no portion of the melt will be retained as the melt is being removed after forming the layer.

REFERENCES:
patent: 3753801 (1973-08-01), Lockwood et al.
patent: 3832225 (1974-08-01), Matsui et al.
patent: 3951700 (1976-04-01), Beppu et al.
patent: 3960618 (1976-06-01), Kawamura et al.
patent: 4050964 (1977-09-01), Rode

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