Process for the production of disilane from monosilane

Details Process for the production of disilane from monosilane Process for the production of disilane from monosilane

1989-07-11

1990-08-21

Stoll, Robert L.

Chemistry: electrical and wave energy

Processes and products

Electrostatic field or electrical discharge

423347, H05F 300, C01B 3304

Patent

active

049503731

ABSTRACT:
A process for the production of disilane from monosilane, in which a gaseous mixture of monosilane and hydrogen is subjected to a plasma discharge.

REFERENCES:
patent: 4064521 (1977-12-01), Carlson
patent: 4568437 (1986-02-01), Dickson
patent: 4604274 (1986-08-01), Zavelovich et al.
Synthesis of the Higher Silanes and Germanes, Gokhale et al, 2/19/65.
Spanier, E. J. et al., "The Conversion of Silane to Higher Silanes in a Silent Electric Discharge", Inorganic Chem. 1, (1962), pp. 432-433.
Brodsky, M. H. et al., "Infrared and Raman Spectra of the Silicon-Hydrogen Bonds in Amorphous Silicon Prepared by Glow Discharge and Sputtering", Phys Rev 16B, (1977), pp. 3556-3557.
Kirk-Othmer Encyclopedia of Chemical Technology, 3rd Edition (1981), vol. 16, pp. 692-695 and Supplement, vol. pp. 600, 602 and 615-616.

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