Process for the production of an inverted structure, active matr

Details Process for the production of an inverted structure, active matr Process for the production of an inverted structure, active matr

1990-08-24

1991-05-14

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437101, 357 237, 350333, 350339R, H01L 21312, H01L 21308, G03C 500, G02F 1133

Patent

active

050155970

ABSTRACT:
Process for producing a wall for an active matrix display screen.
By a first etching is formed stack rows of layers (L) with a metal at the ttom. The gaps between the rows are filled by a negative polyimide. On the surface are etched columns (C) and blocks (P). These elements serve as a mask for an etching leaving control transistors in a gate configuration below the same.
Application to the production of liquid crystal display screens.

REFERENCES:
patent: 4684435 (1987-08-01), Kishi et al.
patent: 4741601 (1988-05-01), Saito
patent: 4783147 (1988-11-01), Maurice et al.
patent: 4788157 (1988-11-01), Nakamura
patent: 4790630 (1988-12-01), Maurice
patent: 4820024 (1989-04-01), Nishiura
patent: 4836650 (1989-06-01), Morin et al.
patent: 4904056 (1990-02-01), Castleberry
patent: 4918504 (1990-04-01), Kato et al.
patent: 4948706 (1990-08-01), Sugihara et al.

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