Process for the production of a microtip electron source and mic

Details Process for the production of a microtip electron source and mic Process for the production of a microtip electron source and mic

1995-04-14

1997-06-03

Ramsey, Kenneth J.

Electric lamp and discharge devices

Discharge devices having a multipointed or serrated edge...

445 50, H01J 902

Patent

active

056357907

ABSTRACT:
A process for the production of microtip electron sources and the products produced thereby. The process includes a first cleaning stage with a first wet chemical cleaning substage and/or a second plasma cleaning substage and a finishing stage using surface etching. A second cleaning stage using a wet chemical cleaning can also be used. The process uses a system of cathode conductors, grids superimposed an intermediate insulator and microtips deposited on the cathode conductors.

REFERENCES:
patent: 4940916 (1990-07-01), Borel et al.
patent: 5194780 (1993-03-01), Meyer
patent: 5203731 (1993-04-01), Zimmerman
patent: 5225820 (1993-07-01), Clerc
Microelectronic Engineering, vol. 13, No. 1/4, pp. 505-508, Mar. 13 1991, D. Stephani, et al., "Microfabrication of Metal-Coated Silicon Tips and Their Field Emmission Properties".
Applied Physics Letters, vol. 63, No. 1, pp. 33-35, Jul. 5, 1993, P.R. Schwoebel, et al., "Field-Emitter Array Performance Enhancement Using Hydrogen Glow Discharges".

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