Process for the production of a microtip electron source

Details Process for the production of a microtip electron source Process for the production of a microtip electron source

1995-08-09

1997-10-14

Valentine, Donald R.

Electrolysis: processes, compositions used therein, and methods

Electrolytic erosion of a workpiece for shape or surface...

Sharpening or point making

205666, 156345, C25F 300, C23F 102

Patent

active

056768184

ABSTRACT:
According to this process a structure is produced comprising an insulating substrate (10) carrying at least one cathode conductor (12), an insulating layer (14), a gate layer (16), holes being formed through these layers, level with the cathode conductor. In the holes are formed microtips made from a metallic material by forming a protective insulating layer (50) on the gate layer, forming a chemical deposit (60) of the metallic material at the bottom of the holes until said material overflows therefrom, by eliminating the protective layer and by electrolytically etching the metallic material. Application to the manufacture of flat screens.

REFERENCES:
patent: 5026437 (1991-06-01), Neukermans et al.
patent: 5151061 (1992-09-01), Sandhu
patent: 5258107 (1993-11-01), Yoshida et al.

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