Process for the production of a microtip electron source

Details Process for the production of a microtip electron source Process for the production of a microtip electron source

1994-06-27

1996-01-09

Bradley, P. Austin

Electric lamp or space discharge component or device manufacturi

Process

With testing or adjusting

445 50, H01J 942

Patent

active

054824869

ABSTRACT:
A method for forming a microtip electron source includes the steps of forming a first microtip electron source using a mask, determining deviations in the structure of the first microtip electron source from a structure which should theoretically have been obtained using the first mask, and then correcting the first mask used during fabrication of the first microtip electron source that are designed to generate additional deviations that compensate for the effects upon performance of the deviations determined in the first microtip electron source when subsequent microtip electron sources are fabricated using the mask.

REFERENCES:
patent: 3817592 (1974-06-01), Swanson
patent: 4324999 (1982-04-01), Wolfe

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