Process for the preparation of partially-substituted fluorosilan

Details Process for the preparation of partially-substituted fluorosilan Process for the preparation of partially-substituted fluorosilan

1993-11-24

1994-09-13

Shaver, Paul F.

Chemistry of inorganic compounds

Silicon or compound thereof

Halogen containing

C01B 3308

Patent

active

053466829

ABSTRACT:
A process is provided by the present invention for the preparation of a partially-substituted fluorosilane represented by the following formula: SiH.sub.n F.sub.4-n wherein n stands for an integer of 1 to 3. The process comprises converting a corresponding partially-substituted chlorosilane represented by the following formula: SiH.sub.n Cl.sub.4-n wherein n has the same meaning as defined above into the partially-substituted fluorosilane by halogen replacement while using a fluorinating agent. The fluorinating agent is zinc fluoride having a water content not higher than 0.2 wt. %. Preferably, the size of crystallites in the direction of a (110) plane of the zinc fluoride is at least 500 .ANG..

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