Process for the preparation of metal nitride coatings from singl

Details Process for the preparation of metal nitride coatings from singl Process for the preparation of metal nitride coatings from singl

1996-10-18

1999-05-04

Chang, Ceila

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

4271261, 4272481, C07F 0728, C07F 0700

Patent

active

059004983

ABSTRACT:
Metal nitride coatings are deposited effectively by the decomposition of single source metal imido-amido-amine precursors prepared by the reaction of a pentavalent metal halide with a primary amine or hydrazine. With hydrazine-derived precursors, TaN coatings may be deposited at temperatures as low as 400 degrees Celcius or lower.

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