Process for the preparation of an o-naphthoquinonediazide sulfon

Details Process for the preparation of an o-naphthoquinonediazide sulfon Process for the preparation of an o-naphthoquinonediazide sulfon

1987-08-20

1989-10-10

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Diazo reproduction, process, composition, or product

Composition or product which contains radiation sensitive...

430165, 430190, 430193, 430326, 534556, 534557, G03C 154, G03C 160, C07C11300

Patent

active

048731692

ABSTRACT:
A process for the preparation of an o-naphthoquinonediazide sulfonic acid ester is disclosed. Esterification of an o-naphthoquinonediazide sulfonic acid halide with a mono- or polyvalent phenolic compound in a solvent is performed in the presence of ammonia, of ammonium salts of weak acids or of aliphatic derivatives of ammonia having 1 to 3 carbon atoms, at a pH within the range from about 1.5 to about 8.5 and a temperature within the range from about 15.degree. C. to about 40.degree. C. The esters of o-naphthoquinonediazide sulfonic acid which are obtained by this process contain only small amounts of metal ions and can be used in photosensitive mixtures satisfying high requirements of the microelectronics industry.

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