Metal working – Piezoelectric device making
Patent
1997-05-20
1998-09-08
Vo, Peter
Metal working
Piezoelectric device making
298901, 216 27, 252 629PZ, 310365, 347 70, H01L 4122, G01D 1520
Patent
active
058026860
ABSTRACT:
A printer head for ink jet recording is disclosed, comprising a single-crystal silicon substrate pierced with holes, a zirconium oxide layer which is brought into direct contact with the surface of the silicon substrate or a silicon oxide layer on the surface of the silicon substrate so as to cover one end of the holes in the silicon substrate, a lower electrode provided on the zirconium oxide layer, a piezoelectric layer provided on the lower electrode, and an upper electrode provided on the piezoelectric layer. A process for the preparation of the above printer head for ink jet recording is also disclosed. The printer head for ink jet recording can support a piezoelectric substance having a high piezoelectricity, can exhibit a high head drive durability and can be produced in a high yield.
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patent: 5265315 (1993-11-01), Hoisington et al.
patent: 5376875 (1994-12-01), Takeuchi et al.
patent: 5493320 (1996-02-01), Sandbach, Jr. et al.
patent: 5555219 (1996-09-01), Akiyama et al.
Vol. 94, No. 101 & JP-A-06 297720 (Seiko Epson Corp), 25 Oct. 1994 *abstract*.
Hasegawa Kazumasa
Shimada Masato
Seiko Epson Corporation
Vo Peter
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