Process for the photochemical vapor deposition of aromatic polym

Details Process for the photochemical vapor deposition of aromatic polym Process for the photochemical vapor deposition of aromatic polym

1984-11-26

1986-05-13

Newsome, John H.

Coating processes

Electrical product produced

Welding electrode

252500, 522 1, 522 66, B05D 306

Patent

active

045886091

ABSTRACT:
A low-temperature process for forming a thin film of an aromatic polymer on the surface of a substrate by exposing the substrate to a monomer precursor containing arylene groups in the presence of radiation of a selected wavelength. Upon radiation inducement, the monomer units interact to form a polymer comprising directly bonded repeating arylene groups, and the polymer deposits as a layer on the substrate. Optionally, the polymer layer may be simultaneously or subsequently doped to provide a conductive polymer layer. Specifically disclosed polymers are polyparaphenylene and its antimony pentafluoride-doped derivative. The former is useful as a dielectric insulator or passivation material in semiconductor devices and circuits, while the latter is useful in batteries and solar cells, or electromagnetic shielding.

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Shacklette et al, "Solid-State Synthesis of Highly Conductive Polyphenylene from Crystalline Oligomers", J. Chem. Phys., vol. 73, No. 8, Oct. 15, 1980, pp. 4098-4102.

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