Process for the micromechanical fabrication of nozzles for liqui

Details Process for the micromechanical fabrication of nozzles for liqui Process for the micromechanical fabrication of nozzles for liqui

1995-11-29

1998-07-21

Schwartz, Larry I.

Metal working

Method of mechanical manufacture

Fluid pattern dispersing device making, e.g., ink jet

216 27, B41J 216

Patent

active

057819947

ABSTRACT:
A process for the micromechanical fabrication of nozzles for ink jets includes forming a groove on a surface of a first substrate, securing the first substrate to a second substrate to form an assembly in which the second substrate covers the groove to form a channel having walls, and then forming an internal protective coating within the channel by thermal oxidation of the walls of the channel. The first and second substrates are then cut along a plane extending perpendicular to the channel thereby to form a nozzle for dispensing a liquid jet. Scales, formed as a result of the cutting operations, are formed on the internal protective coating rather than directly on the walls of the channel. These scales then are removed from the nozzle by eliminating the internal protective coating.

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