Process for the manufacture of PZT films

Coating processes – Heat decomposition of applied coating or base material

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4271263, B05D 302

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055018769

ABSTRACT:
A process for producing PZT films on a substrate by thick-film technique in which the PZT films contain simply modified PZT and/or PZT with complex perovskite. PZT with a Zr content X of X.gtoreq.X.sub.p +0.02.ltoreq.X.sub.p +0.10 is used, where X.sub.p is the Zr content of the base composition at the morphotropic phase boundary determined by the maximum coupling factor K.sub.r.

REFERENCES:
patent: 4812426 (1989-03-01), Takagi et al.
patent: 4963390 (1990-10-01), Lipeles et al.
patent: 5116643 (1992-05-01), Miller et al.
patent: 5271955 (1993-12-01), Maniar
Teowee et al, "Effect of Zr/Ti stoichiometry ratio on the ferroelectric properties of Sol-gel derived PZT films," ISAF '92, Proc. IEEE Int. Symp. Appl. Ferroelectr., 8th pp. 424-427, 1992.

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