Process for the manufacture of PNP transistors high power

Details Process for the manufacture of PNP transistors high power Process for the manufacture of PNP transistors high power

1979-04-12

1980-11-11

Ozaki, G.

Metal treatment

Process of modifying or maintaining internal physical...

Chemical-heat removing or burning of metal

148186, 148187, 148188, H01L 21225

Patent

active

042330939

ABSTRACT:
PNP high power transistors are made in high yield by a process wherein the base diffusion step is conducted in a diffusion furnace wherein phosphorus is deposited on the walls of the furnace. This results in a sharp collector to base junction.

REFERENCES:
patent: 3314833 (1967-04-01), Arndt et al.
patent: 3418181 (1968-12-01), Robinson
patent: 3529347 (1970-09-01), Ingless et al.
patent: 3713913 (1973-01-01), Wolfle et al.
patent: 3791884 (1974-02-01), Dathe et al.
patent: 3806371 (1974-04-01), Barone

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