Chemistry of inorganic compounds – Silicon or compound thereof – Halogen containing
Patent
1984-03-28
1985-09-17
Dixon, Jr., William R.
Chemistry of inorganic compounds
Silicon or compound thereof
Halogen containing
423341, 423347, 423DIG10, 204164, C01B 33107
Patent
active
045420041
ABSTRACT:
An improved process is disclosed for the high pressure plasma hydrogenation of silicon tetrachloride. Hydrogen and silicon tetrachloride are reacted in the presence of a high pressure plasma and further in the presence of a boron catalyst to form trichlorosilane and dichlorosilane. By adding the boron catalyst the overall conversion efficiency is increased and the dichlorosilane content in the reaction effluent is increased.
REFERENCES:
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patent: 3126248 (1964-03-01), Pohl et al.
patent: 4309259 (1982-01-01), Sarma et al.
patent: 4321246 (1982-03-01), Sarma et al.
Chanley Charles S.
Sarma Kalluri R.
Capella Steven
Dixon Jr. William R.
Fisher John A.
Solavolt International
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