Process for the fabrication of aluminum metallized pyrolytic gra

Details Process for the fabrication of aluminum metallized pyrolytic gra Process for the fabrication of aluminum metallized pyrolytic gra

1993-04-05

1995-07-04

Hughes, S. Thomas

Metal working

Method of mechanical manufacture

Combined manufacture including applying or shaping of fluent...

29458, 295272, 156153, 1562726, 156281, 20429812, 20429813, 21912164, 2281241, 419 68, 427250, 427597, B22D 1900

Patent

active

054288827

ABSTRACT:
An improved method for fabricating pyrolytic graphite sputtering targets with superior heat transfer ability, longer life, and maximum energy transmission. Anisotropic pyrolytic graphite is contoured and/or segmented to match the erosion profile of the sputter target and then oriented such that the graphite's high thermal conductivity planes are in maximum contact with a thermally conductive metal backing. The graphite contact surface is metallized, using high rate physical vapor deposition (HRPVD), with an aluminum coating and the thermally conductive metal backing is joined to the metallized graphite target by one of four low-temperature bonding methods; liquid-metal casting, powder metallurgy compaction, eutectic brazing, and laser welding.

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