Etching a substrate: processes – Forming or treating mask used for its nonetching function
Patent
1994-02-14
1997-09-16
Dang, Thi
Etching a substrate: processes
Forming or treating mask used for its nonetching function
216 58, 216 60, 216 67, 216 72, 216 76, 216 65, 216 66, B05D 500
Patent
active
056677006
ABSTRACT:
A process for the fabrication of a structural element, in particular an optical element comprises a carrier substrate as well as a layer system, with at least one dielectric layer stepped with respect to its thickness in at least one region opposite at least one second region. The dielectric layer is of the type MeO.sub.x and is applied onto a base, where Me is a metal whose atomic mass is at least 44, and x is selected so that the coefficient of absorption of the layer material at light of wavelength .lambda.=308 nm is k.sub.308 .ltoreq.0.01. The layer is built up through reactive etching by means of an activated gas for the step formation of the thickness. Other related processes and examples of the elements themselves are also disclosed.
REFERENCES:
patent: 3880684 (1975-04-01), Abe
patent: 4141621 (1979-02-01), Aagard et al.
patent: 4431695 (1984-02-01), Flatscher
patent: 4534620 (1985-08-01), Gale et al.
patent: 4569717 (1986-02-01), Ohgami et al.
patent: 4684436 (1987-08-01), Burns et al.
patent: 4780175 (1988-10-01), Taneya et al.
patent: 4923772 (1990-05-01), Kirch et al.
patent: 5074456 (1991-12-01), Degner et al.
patent: 5246529 (1993-09-01), Fukasawa et al.
patent: 5252516 (1993-10-01), Nguyen et al.
patent: 5254202 (1993-10-01), Kaplan
patent: 5298351 (1994-03-01), Bobroff et al.
J.P. Lehan et al., Optical and Microstructural Properties of Hafnium Dioxide Thin Films, Elsevier Sequoia (1991).
Edlinger Johannes
Rudigier Helmut
Balzers Aktiengesellschaft
Dang Thi
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