Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal
Patent
1982-10-29
1984-12-18
Saba, William G.
Metal treatment
Process of modifying or maintaining internal physical...
Chemical-heat removing or burning of metal
29576E, 149174, 156610, 156612, 156613, 156614, H01L 21205, H01L 21322
Patent
active
044889143
ABSTRACT:
A process for depositing an epitaxial film of a III-V compound onto the surface of a crystallographically compatible substrate which includes contacting said substrate with a vaporous mixture of a group III element and a group V element to effect the deposition of a group III-V compound thereon while simultaneously introducing a flow of hydrogen halide gas during deposition of the group III-V compound.
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Olsen et al., "Crystal Growth . . . (Im, Ga) (Aa, P) . . . Hydride . . . Epitaxy . . . ", Prog. Crystal Growth Charact., vol. II, 1979, pp. 309-375.
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Erstfeld Thomas E.
Quinlan Kenneth P.
O'Brien William J.
Saba William G.
Singer Donald J.
The United States of America as represented by the Secretary of
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