Process for the deposition by epitaxy of a doped material

Fishing – trapping – and vermin destroying

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148DIG2, 148DIG41, 148DIG46, 148DIG169, 156612, 427 35, 427 431, 437168, 437173, 437935, 437936, 437951, 437987, H01L 21203, C30B 2302

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048472166

ABSTRACT:
The process consists of depositing at least one layer of a doped material on a heated substrate placed in an enclosure, subjecting the substrate surface to the action of a molecular flux of the material, to the action of a doping particle beam and to the action of an electron beam.

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Ota, "Silicon MBE", Thin Solid Films, vol. 106, No. 1/2, 1983, pp. 22-27.
Smit et al., "Silicon Molecular Beam Epitaxy on Arsenic-Implanted and Laser-Processed Silicon", Appl. Phys. Lett., 40(1), Jan. 1982, pp. 64-66.
Allen et al., "Summary Abstract: Properties of Several Types of Films Deposited by Laser", J. Vac. Sci. Technol., 20(3), Mar. 1982, pp. 469-470.

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