Process for the chemical vapor deposition of aluminum

Details Process for the chemical vapor deposition of aluminum Process for the chemical vapor deposition of aluminum

1989-03-17

1990-05-08

Childs, Sadie

Coating processes

Coating by vapor, gas, or smoke

Metal coating

427253, 427255, 4272557, 427404, C23C 1606, C23C 1608, C23C 1618

Patent

active

049237179

ABSTRACT:
A method for forming aluminum films is provided comprising employing the techniques of chemical vapor deposition to thermally decompose a vapor comprising a aluminum hydride subsequent to the treatment of the substrate with a Group IVB or VB metal complex, so as to deposit a mirror-like coating of aluminum on the surface of a substrate.

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