Coating processes – Electrical product produced – Condenser or capacitor
Patent
1985-06-13
1986-11-25
Smith, John D.
Coating processes
Electrical product produced
Condenser or capacitor
156643, 427 90, 427 96, 430316, H01L 21283, H01L 2190
Patent
active
046248641
ABSTRACT:
This process consists of depositing a first conductive coating on the complete circuit, depositing on said coating a filling material used for filling the contact hole, the surface of said material being substantially planar, carrying out an anisotropic etching of said filling material so as to expose those parts of the first conductive coating located outside the contact hole and only retaining that part of said filling material which fills the contact hole, depositing on the structure obtained a second conductive coating in which the interconnection line will be formed, producing in the second conductive coating a resin mask used for defining the dimensions of the line, eliminating those parts of the second and first conductive coatings which are free from the mask and eliminating the mask.
REFERENCES:
patent: 4025411 (1977-05-01), Hom-Ma
patent: 4361599 (1982-11-01), Wourms
patent: 4392298 (1983-01-01), Barker et al.
patent: 4518629 (1985-05-01), Jeuch
patent: 4520041 (1985-05-01), Aoyama
patent: 4538344 (1985-09-01), Okumura
patent: 4544576 (1985-10-01), Chu
Commissariat a l''Energie Atomique
Smith John D.
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