Process for testing a semiconductor device

Details Process for testing a semiconductor device Process for testing a semiconductor device

1997-07-15

2000-07-18

Raevis, Robert

Measuring and testing

Inspecting

G01R 3102

Patent

active

060891076

ABSTRACT:
A method for positioning a workpiece comprises the steps of providing a pedestal having a chamfered portion and a generally circular portion having a first diameter and providing a table having a hole therein and a chamfered portion, the hole having a second diameter larger than the first diameter. The inventive method further includes the steps of supporting the pedestal with the table, the chamfered portion of the table contacting the chamfered portion of the pedestal and placing the workpiece on the pedestal. Next, the chamfered portion of the pedestal is urged away from the table. Subsequent to the step of urging the chamfered portion of the pedestal away from the table, the pedestal is moved in at least one of X-, Y-, and theta directions while the generally circular portion of the pedestal extends into the hole in the table.

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patent: 4980636 (1990-12-01), Romanofsky et al.
patent: 5321352 (1994-06-01), Takebuchi
patent: 5436568 (1995-07-01), Woith
patent: 5670888 (1997-09-01), Cheng

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