Process for synthesizing quinonediazide ester utilizing base cat

Details Process for synthesizing quinonediazide ester utilizing base cat Process for synthesizing quinonediazide ester utilizing base cat

1995-09-21

1996-06-04

Bowers, Jr., Charles L.

Organic compounds -- part of the class 532-570 series

Organic compounds

Diazooxide or diazotate

430190, 430193, G03F 7022, G03F 7023

Patent

active

055233961

ABSTRACT:
A process for synthesizing a quinonediazide ester is disclosed in which the esterification reaction of a polyhydroxy compound with 1,2-naphthoquinonediazide-5-(and/or -4-)sulfonyl chloride is carried out in the presence of a base catalyst comprising a basic compound represented by formula (I) or (II): ##STR1## wherein R.sub.1 to R.sub.15 are defined in the disclosure. A positive working photoresist containing the ester is also disclosed. The process is capable of highly selectively yielding the desired photosensitive material containing specific unreacted hydroxyl group(s). The photoresist has high resolving power with reduced film thickness dependence of the resolving power, is less apt to leave a development residue, and has excellent storage stability for prolonged period of time.

REFERENCES:
patent: 5250669 (1993-10-01), Ogawa et al.
patent: 5272036 (1993-12-01), Tani et al.

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