Process for surface treatment by plasma of a substrate supported

Details Process for surface treatment by plasma of a substrate supported Process for surface treatment by plasma of a substrate supported

1989-11-22

1992-04-07

Lusignan, Michael

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 39, 156643, 156627, B05D 306, H01L 21306, B44C 122

Patent

active

051026872

ABSTRACT:
This invention relates to a process for surface treatment of a substrate carried by an electrode and immersed in a sealed engraving or deposition chamber equipped with plasma generating means, of the type involving the application to the electrodes, of a variable voltage, produced by a generator that is independent of the plasma generating means, wherein said process comprises the steps of:

REFERENCES:
patent: 4615299 (1986-10-01), Matsuyama et al.
patent: 4795529 (1989-01-01), Kawasaki et al.
patent: 4915977 (1990-04-01), Okamoto et al.

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