Process for suppressing electromigration in conducting lines for

Details Process for suppressing electromigration in conducting lines for Process for suppressing electromigration in conducting lines for

1980-04-17

1982-10-05

Dean, R.

Metal working

Method of mechanical manufacture

Electrical device making

148 13, 148 203, H01L 21477

Patent

active

043522394

ABSTRACT:
A process for suppressing electromigration in conducting lines formed on integrated circuit structures includes the steps of forming the conducting lines on the integrated circuit structure and heat treating the lines to cause the average grain size in the lines to become larger than the width of the conducting lines.

REFERENCES:
patent: 3848330 (1974-11-01), Hall et al.

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