Process for supplying a gas, especially of diborane and silane

Details Process for supplying a gas, especially of diborane and silane Process for supplying a gas, especially of diborane and silane

1995-04-25

1995-12-26

Bueker, Richard

Coating apparatus

Control means responsive to a randomly occurring sensed...

Responsive to attribute, absence or presence of work

118708, 118712, 118715, 73 2405, 137 91, 137 92, C23C 1600

Patent

active

054783950

ABSTRACT:
A process for supplying a gas to a reactor comprising the steps of:

REFERENCES:
patent: 4369031 (1983-01-01), Goldman et al.
patent: 4546016 (1985-10-01), Kern
patent: 5190913 (1993-03-01), Higashiyama et al.

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