Process for sorption of hazardous waste products from exhaust ga

Chemistry of inorganic compounds – Modifying or removing component of normally gaseous mixture – Nitrogen or nitrogenous component

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423210, 423240R, 4232451, C01C 300, B01D 4700, C01B 700, B01J 800

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active

053208170

ABSTRACT:
A method for cleaning an exhaust gas containing ammonia and at least one silicon-containing compound selected from the group consisting of silane and chlorosilanes, which comprises contacting the exhaust gas with a scavenger comprising a metal salt which forms tight complexes with ammonia. This ammine-forming metal salt may be immobilized on a porous solid support. Suitable ammine-forming metal salts include the sulfates, nitrates, chlorides, bromides, iodides, and hydroxides of copper, cobalt, iron, and nickel. Suitable supports include materials which are compatible with the gas mixtures being cleaned and the reaction products of the sorption process and which are stable under the conditions of use. Useful support materials include zeolites, aluminosilicates, alumina, silica, silica gel, kieselguhr, and activated carbon.

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"TLV's-Threshold Limit Values and Biological Exposure Indices for 1987-88," ACGIH, 1987, Air Contaminants-Permissible Exposure Limits.
"CVD Exhaust-Safety and Environmental Sanity," M. L. Hammond, Euro CVD8, J. Phys. Colloq. C2, Sep. 1991, pp. C2-449-57.
"Vent Sorb" Calgon Corp., 1986.
"VLSI Fabrication Principles: Silicon and Gallium Arsenide," S. K. Gandhi, John Wiley & Sons, New York, 1983, pp. 427-429.

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