Process for setting the frequency of a silicon microresonator

Details Process for setting the frequency of a silicon microresonator Process for setting the frequency of a silicon microresonator

1994-09-13

1995-09-19

Pianalto, Bernard

Coating processes

Measuring, testing, or indicating

427 99, 427255, 4272554, 427399, 427583, 427595, B05D 512

Patent

active

054514258

ABSTRACT:
A silicon chip which is used as a microresonator, filter or the like and which may include an integrated circuit, has its resonant frequency adjusted by increasing its thickness in an ozone-rich atmosphere which may be supplemented by ultraviolet light and/or heat. The process lends itself to low cost, mass production techniques.

REFERENCES:
Clark T. -C. Nguyen and Roger T. Howe, "Design and Performance of CMOS Mimechanical Resonator Oscillators," 1994 IEEE International Frequency Control Symposium (No Month Available).
Roger T. Howe, "Applications of Silicon Micromachining to Resonator Fabrication," 1994 IEEE Internation Frequency Control Symposium (No Month Available).

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