Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1984-09-14
1986-03-11
Hearn, Brian E.
Metal working
Method of mechanical manufacture
Assembling or joining
29571, 29578, 29577C, 29576B, 148 15, 148175, 148188, 148DIG122, 148DIG83, 148DIG35, 148DIG86, 148DIG117, 357 49, 357 59, H01L 2176, H01L 21223, H01L 2131, H01L 2174
Patent
active
045744696
ABSTRACT:
A process is described for producing isolated semiconductor devices in a common substrate which have self-aligned and pre-located isolation walls, buried layers, and channel-stops. The isolation walls are formed from a stacked arrangement of a dielectric region and a non-single crystal semiconductor region, above a doped channel-stop region. A single mask layer determines the location and spacing of the non-single crystal portion of the isolation walls, the channel-stops, and the buried layers.
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Casteel Carroll
Hulseweh Terry S.
Mastroianni Sal
Handy Robert M.
Hearn Brian E.
Hey David A.
Motorola Inc.
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