Semiconductor device manufacturing: process – Including control responsive to sensed condition
Reexamination Certificate
2005-02-08
2005-02-08
Smith, Matthew (Department: 2825)
Semiconductor device manufacturing: process
Including control responsive to sensed condition
C438S015000, C438S016000, C438S017000, C438S018000, C438S014000
Reexamination Certificate
active
06852552
ABSTRACT:
A process for selective deposition of material on electrodes of chips made from a single substrate. The process includes forming a plurality of chips on the same substrate. Each chip includes a plurality of electrodes, address pads, and an address area containing the programmed address of the chip. The address areas are connected to the address pads and capable of recognizing the address of the chip to activate the chip. The process also includes establishing electrical connections to connect the address pads and the plurality of electrodes on each chip for the activation of the chips and polarization of the electrodes. Further, the process includes addressing the chips and electrodes on which a first material is to be deposited, and simultaneously depositing the first material on the addressed electrodes of the activated chips. The addressing and deposition steps are repeated as many times as necessary to make material depositions on the other electrodes.
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Belleville Marc
Bour Catherine
Jaffard Claudine
Apibio
Commissariat a l''Energie Atomique
Smith Matthew
Yevsikov Victor V
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