Process for sealing apertures in glass-silicon-glass micromechan

Details Process for sealing apertures in glass-silicon-glass micromechan Process for sealing apertures in glass-silicon-glass micromechan

1994-12-16

1996-07-02

Fourson, George

Fishing, trapping, and vermin destroying

437219, 437213, 437915, 437919, 437927, H01L 2148, H01L 2152, H01L 2154, H01L 2160

Patent

active

055321879

ABSTRACT:
A method for sealing apertures caused by manufacturing processes in micromechanical acceleration sensors is disclosed whereby apertures or recesses, serving for leading the conductor paths out of the oscillation space of an acceleration sensor without causing short circuits, can be sealed in a gas-tight manner in a simple way. The conductor paths establish the conducting connection between junction contacts of the acceleration sensor accessible from the outside with electrodes which are allocated on both sides to the oscillating mass of the acceleration sensor which is also configured as an electrode. The method provides to use an adhesive, which is curable or hardenable by means of light, and in particular, ultraviolet light. A specific quantity of the adhesive is applied at a certain point of the acceleration sensor and, after an experimentally determined distribution time period has elapsed, after which the adhesive has also penetrated into the recesses under the influence of capillary effect and has sealed same, is hardened or cured by exposure to light. The sealing process occurs in a nitrogen atmosphere. Prior to the above, the oscillation space was evacuated.

REFERENCES:
patent: 4435737 (1984-03-01), Colton
patent: 4855544 (1989-08-01), Glenn
patent: 5273939 (1993-12-01), Becker et al.
patent: 5350189 (1994-09-01), Tsuchitani et al.
patent: 5392650 (1928-02-01), O'Brien et al.
patent: 5434602 (1994-09-01), Plankenhorn

Affiliated with

Also associated with

Rating

Process for sealing apertures in glass-silicon-glass micromechan does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for sealing apertures in glass-silicon-glass micromechan, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for sealing apertures in glass-silicon-glass micromechan will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1506250