Stone working – Sawing – Rotary
Patent
1987-11-19
1989-07-04
Schmidt, Frederick R.
Stone working
Sawing
Rotary
125 20, 51383R, 51325, B28D 104
Patent
active
048440477
ABSTRACT:
A process for the sawing of crystal rods or blocks into thin wafers by innal-hole saws is specified. In this process, the deviation of the saw blade from the intended cutting line, occurring in virtually every sawing operation, is countered by the force of a fluid being applied, at least periodically, to the side surfaces of the blade. This allows the force conditions in the saw cut and thus the deflection of the saw blade, to be influenced. This process results in an improved geometrical quality of the wafers obtained and in prolonged service life of the saw blades which have to be resharpened less often.
REFERENCES:
patent: 4484417 (1984-11-01), Klingerman
patent: 4502459 (1985-03-01), Dyer
patent: 4513544 (1985-04-01), Lossi et al.
Brehm Gerhard
Glas Johann
Langsdorf Karlheinz
Niedermeier Johann
Rachuba Maurina
Schmidt Frederick R.
Wacker Chemitronic Gesellschaft fur Elektronik-Grundstoffe mbH
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