Semiconductor device manufacturing: process – Repair or restoration
Patent
1997-09-30
1999-07-06
Niebling, John F.
Semiconductor device manufacturing: process
Repair or restoration
438459, 438460, 438476, 438928, 438959, 438977, H01L 2100
Patent
active
059207647
ABSTRACT:
A process applicable to the restoration of defective or rejected semiconductor wafers to a defect-free form uses etchants and a variation of the Smart-Cut.RTM. process. Because of the use of the variation on the Smart-Cut.RTM. process, diffusion regions are removed without significantly affecting the specifications of the semiconductor wafer. Therefore, a defective or rejected wafer can be restored to near original condition for use in semiconductor manufacturing.
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Hanson David R.
Huston, III Hance H.
Srikrishnan Kris V.
International Business Machines - Corporation
Niebling John F.
Townsend Tiffany L.
Zarneke David A.
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