Process for removing particles from reticle

Details Process for removing particles from reticle Process for removing particles from reticle

2008-07-08

2008-07-08

El-Arini, Zeinab (Department: 1792)

Cleaning and liquid contact with solids

Processes

Combined

C134S034000, C134S036000, C134S037000

Reexamination Certificate

active

07396418

ABSTRACT:
A process for removing particles from a reticle is described, wherein the process is performed by using a pellicle particle detector (PPD) and a particle removing tool disposed in front of the PPD as well as fixed to the PPD. The particle removing tool includes at least one gas spray member directed toward a surface of the reticle for removing particles. The process includes steps as follows, step (a) loading the reticle into the PPD through the gas spray member to detect whether the reticle has particles thereon; step (b) ejecting the reticle from the PPD; step (c) turning on the particle removing tool as well as going back to step (a) when particles are detected on the reticle, and ending the particle removal process when no particle is detected on the reticle.

REFERENCES:
patent: 7047984 (2006-05-01), Blattner et al.
patent: 06-163344 (1994-06-01), None

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