Process for removing organics from ultrapure water

Details Process for removing organics from ultrapure water Process for removing organics from ultrapure water

2006-01-31

2006-01-31

Barry, Chester T. (Department: 1724)

Liquid purification or separation

Processes

Ion exchange or selective sorption

C210S691000, C210S692000, C210S900000, C210S760000, C210S748080, C210S750000, C210S664000

Reexamination Certificate

active

06991733

ABSTRACT:
In order to reduce a total organic carbon (TOC) in ultrapure water to a level less than 1 ppb, several cycles of ozone contact/UV irradiation treatments are carried out in sequence. Preferably, the first cycle further includes an ion exchange treatment which is applied to the resulting UV irradiation water.

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