Chemistry: electrical and wave energy – Processes and products – Processes of treating materials by wave energy
Patent
1992-04-24
1993-03-02
Niebling, John
Chemistry: electrical and wave energy
Processes and products
Processes of treating materials by wave energy
204149, 204151, 210748, 210757, C01B 1316, C02F 146
Patent
active
051906279
ABSTRACT:
Ultrapure water is formed by a process employing a simple system for safely and easily removing oxygen from water containing dissolved oxygen; which process comprises dissolving a reducing agent in water containing dissolved oxygen and irradiating the resulting water with ultraviolet rays. The ultrapure water is particularly utilized as a rinsing water in the electronics industry.
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Arimitsu Hidenobu
Iwase Yoko
Nakajima Ken
Saito Takayuki
Shima Hiroyuki
Bolam Brian M.
Ebara Corporation
Ebara Research Co. Ltd.
Niebling John
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