Chemistry of inorganic compounds – Modifying or removing component of normally gaseous mixture – Halogenous component
Patent
1998-01-02
2000-02-29
Griffin, Steven P.
Chemistry of inorganic compounds
Modifying or removing component of normally gaseous mixture
Halogenous component
423210, 423219, 423225, 423230, 423234, 423235, 4232391, 423240R, 423241, 423246, 423247, C01B 700
Patent
active
060305916
ABSTRACT:
A process for recovery of fluorocompound gas from an effluent gas stream containing the fluorocompound gas and other gas components, in which at least one of the other gas components is removed, e.g., by oxidation or contacting of the effluent stream with a dry material such as an adsorbent or scrubber medium, to yield a first effluent gas mixture containing the fluorocompound gas. The fluorocompound gas is removed from the first effluent gas mixture and recovered as a concentrated fluorocompound gas, by a process such as cryogenic processing, membrane separation, and/or adsorption.
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Fisher H. Eric
Olander W. Karl
Tom Glenn M.
ATMI Ecosys Corporation
Griffin Steven P.
Hendrickson Stuart L.
Hultquist Steven J.
Mavrakakis Thomas C.
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