Semiconductor device manufacturing: process – Having organic semiconductive component
Reexamination Certificate
2005-10-11
2005-10-11
Niebling, John F. (Department: 2812)
Semiconductor device manufacturing: process
Having organic semiconductive component
C438S149000, C438S738000, C438S780000, C257S099000
Reexamination Certificate
active
06953705
ABSTRACT:
A method of dry etching a performance sensitive element of an organic electronic device, said method comprising the steps of: (a) having at least one performance sensitive element on the substrate spaced apart from a first conductive member, wherein at least one of the performance sensitive elements is a conductive lead; (b) placing organic material on the performance sensitive element and the first conductive member, (c) forming a patterned conductive layer over the organic material exposing a predetermined portion of the performance sensitive elements; and (d) dry etching the organic material in the exposed areas of the performance sensitive elements using at least one oxygen-containing gas, and organic electronic device created using said process.
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E. I. du Pont de Nemours and Company
Isaac Stanetta
Niebling John F.
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