Process for removal of water

Details Process for removal of water Process for removal of water

1986-12-29

1988-02-09

Makay, Albert J.

Drying and gas or vapor contact with solids

Apparatus

With means to treat gas or vapor

34 15, 34 36, 34 92, F26B 100, F26B 504

Patent

active

047233630

ABSTRACT:
The process utilizes a volatile organo halosilane, such as trimethylchlorosilane, injected through a mass flow controller into a deposition, or like, reactor to dry the mass flow controller, transfer lines and injectors, the deposition surfaces and reactor walls, the exhaust manifold, and vacuum pump and oil.

REFERENCES:
patent: 4307518 (1981-12-01), Izumo et al.
patent: 4547404 (1983-10-01), Cambell et al.
patent: 4554180 (1985-11-01), Hirooka
patent: 4560589 (1985-12-01), Endou et al.
patent: 4598024 (1986-07-01), Stinton et al.
patent: 4639379 (1987-01-01), Asai et al.
patent: 4660297 (1987-04-01), Danielson

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