Gas separation: processes – Solid sorption – Inorganic gas or liquid particle sorbed
Reexamination Certificate
2005-07-07
2010-11-30
Lawrence, Frank M (Department: 1797)
Gas separation: processes
Solid sorption
Inorganic gas or liquid particle sorbed
C423S24000R, C095S900000
Reexamination Certificate
active
07842125
ABSTRACT:
Disclosed herein are a process for the refinement of nitrogen trifluoride gas and an adsorbent used therein. A nitrogen trifluoride (NF3) gas including carbon tetrafluoride (CF4) as an impurity is permeated into a bed of the zeolite 3 A, 4A or 5 A which is ion exchanged with alkali earth metal and is thermally treated at 150 to 600° C. for 0.5 to 100 hours so as to selectively adsorb nitrogen trifluoride onto the bed, followed by the desorption of the nitrogen trifluoride therefrom.
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Hyun Kwang-Chul
Jeong Woo-Sik
Kwon Ik-Hyeon
Lee Jang-Won
Park Yong-Chul
Dickstein & Shapiro LLP
Hyosung Corporation
Lawrence Frank M
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