Process for refining nitrogen trifluoride gas using alkali...

Details Process for refining nitrogen trifluoride gas using alkali... Process for refining nitrogen trifluoride gas using alkali...

2005-07-07

2009-12-29

Lawrence, Frank M (Department: 1797)

Gas separation: processes

Solid sorption

Inorganic gas or liquid particle sorbed

C095S900000, C423S24000R

Reexamination Certificate

active

07637986

ABSTRACT:
Disclosed herein are a process for the refinement of nitrogen trifluoride gas and an adsorbent therefor. A nitrogen trifluoride (NF3) gas including carbon tetrafluoride (CF4) as an impurity is permeated into a bed of zeolite 3A, 4A or 5A which undergoes ion exchange and impregnation with alkali earth metal and is thermally treated at 150 to 600° C. for 0.5 to 100 hours so as to be able to selectively adsorb nitrogen trifluoride onto the bed, followed by the desorption of the nitrogen trifluoride therefrom.

REFERENCES:
patent: 4193976 (1980-03-01), Lileck et al.
patent: 4933158 (1990-06-01), Aritsuka et al.
patent: 4948571 (1990-08-01), Harada et al.
patent: 5053372 (1991-10-01), Brownscombe
patent: 5069690 (1991-12-01), Henderson et al.
patent: 5069887 (1991-12-01), Suenaga et al.
patent: 5976222 (1999-11-01), Yang et al.
patent: 6187077 (2001-02-01), Li
patent: 7384618 (2008-06-01), Singh et al.
patent: 2001/0049998 (2001-12-01), Rode et al.
patent: 2003/0029314 (2003-02-01), Nakamura et al.
patent: 2003/0221556 (2003-12-01), Igumnov et al.
patent: 7-132211 (1995-05-01), None

Affiliated with

Also associated with

Rating

Process for refining nitrogen trifluoride gas using alkali... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for refining nitrogen trifluoride gas using alkali..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for refining nitrogen trifluoride gas using alkali... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4066957