Process for reducing the resistivity of an electrically...

Details Process for reducing the resistivity of an electrically... Process for reducing the resistivity of an electrically...

2005-07-05

2005-07-05

Chen, Bret (Department: 1762)

Coating processes

Coating by vapor, gas, or smoke

Metal coating

C427S255310, C427S376200

Reexamination Certificate

active

06913790

ABSTRACT:
The resistivity of an electrically conductive layer of molybdenum or a molybdenum alloy is reduced. For that purpose, a MoO2layer is formed on the surface of the electrically conductive layer. The sheet resistivity can thereby be reduced in the order of magnitude of 10% to 15%.

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patent: 0 806 785 (1997-11-01), None
Ohfuji, S.-I.: “Oxygen Concentration Changes In Oxygen-Doped Molybdenum Films Under High Temperature Annealing”, Elsevier; No. 4, May 1984, pp. 299-307.

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