Process for recovery, purification, and recycle of argon

Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Waste gas purifier

Reexamination Certificate

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Details

C422S177000, C062S636000, C062S632000, C062S924000

Reexamination Certificate

active

10925096

ABSTRACT:
A system for the purification and recycle of impure argon is disclosed herein. The system of the present invention can produce very high purity argon, i.e., about 1 ppb or less of impurities. In one embodiment, a cryogenic separation apparatus is used to remove the nitrogen, hydrocarbon, and hydrogen impurities from the argon stream. A catalyst bed is then operated at ambient temperature to remove hydrogen, oxygen, and carbon monoxide impurities to provide the purified argon product.

REFERENCES:
patent: 5106399 (1992-04-01), Fisher
patent: 5706674 (1998-01-01), Hsiung et al.
patent: 6113869 (2000-09-01), Jain et al.
patent: 6123909 (2000-09-01), Yamamoto et al.
patent: 489387 (1992-03-01), None
patent: 624962 (1994-04-01), None
patent: 733581 (1995-02-01), None

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