Process for recovering SF6 from a gas

Details Process for recovering SF6 from a gas Process for recovering SF6 from a gas

1997-05-15

1999-01-05

Spitzer, Robert

Gas separation: processes

Selective diffusion of gases

Selective diffusion of gases through substantially solid...

95 47, 95 51, 95 52, 95 54, 95132, 95287, 423155, 423240R, B01D 5322, B01D 5368

Patent

active

058556478

ABSTRACT:
A process for recovering SF.sub.6 from a gas is provided. The process includes the step of contacting a gas stream comprising SF.sub.6 and at least one of N.sub.2, O.sub.2, CO.sub.2, and H.sub.2 O with a membrane in at least one membrane separation unit at conditions effective to obtain a retentate stream rich in SF.sub.6 and a permeate stream rich in at least one of N.sub.2, O.sub.2, CO.sub.2, and H.sub.2 O.

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