Process for recovering SF.sub.6 from a gas

Details Process for recovering SF.sub.6 from a gas Process for recovering SF.sub.6 from a gas

1998-10-30

2000-08-01

Spitzer, Robert

Gas separation: processes

Selective diffusion of gases

Selective diffusion of gases through substantially solid...

95 51, 95 52, 95 54, 423155, 423241, B01D 5322

Patent

active

060961147

ABSTRACT:
A process for recovering SF.sub.6 from a gas is provided. The process includes the step of contacting a gas stream comprising SF.sub.6 and at least one of N.sub.2, O.sub.2, CO.sub.2, and H.sub.2 O with a membrane in at least one membrane separation unit at conditions effective to obtain a retentate stream rich in SF.sub.6 and a permeate stream rich in at least one of N.sub.2, O.sub.2, CO.sub.2, and H.sub.2 O. A process for forming solidified Mg metal is also provided. The process includes recovering and/or recycling of SF.sub.6 and/or CO.sub.2.

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