Process for purification of hydrogen peroxide

Details Process for purification of hydrogen peroxide Process for purification of hydrogen peroxide

1995-03-21

1997-03-25

Langel, Wayne

Chemistry of inorganic compounds

Oxygen or compound thereof

Peroxide

C01B 1501

Patent

active

056141653

ABSTRACT:
A process for purification of hydrogen peroxide is provided which comprises contacting an aqueous hydrogen peroxide solution with a chelate resin. According to the process, it is possible to remove impurities in the aqueous hydrogen peroxide solution in high efficiency, and particularly, it is possible to remove iron, aluminum, etc., which are difficult to remove singly by ion exchange resins, up to extremely low concentrations. Highly pure hydrogen peroxide solutions obtained by this invention can suitably used for washing of silicon wafers.

REFERENCES:
patent: 4792403 (1988-12-01), Togo et al.
patent: 4999179 (1991-03-01), Sugihara et al.
patent: 5055286 (1991-10-01), Watanabe et al.
patent: 5200166 (1993-04-01), Shiga et al.

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