Process for protecting surfaces against ambient particulate cont

Details Process for protecting surfaces against ambient particulate cont Process for protecting surfaces against ambient particulate cont

1991-04-23

1993-09-07

Bennet, Henry A.

Drying and gas or vapor contact with solids

Apparatus

With means to treat gas or vapor

34107, F26B 300

Patent

active

052417581

ABSTRACT:
The blowing ramp formed by the blowing elements makes it possible to maintain under an ultra-clean atmosphere the planar services of objects during their transportion or conveying, whilst using a limited air flow; the blowing elements are mainly constituted by a plate 2 having a central orifice 6 facing which is located a pipe 4 supplied with ultra-clean air; the process consists of placing the surface (11) of the object (10) at a distance (d) of approximately 1 mm from the blowing surface (7). The flow of air between these two surfaces is easily regulated in such a way as to be laminar, thus providing protection against ambient particulate contamination, which application may be applied to the conveying of silicon wafers.

REFERENCES:
patent: 4236851 (1980-12-01), Szasz
IBM Technical Disclosure Bulletin, 22(5), 1864-65 (1979) "Diverted flow Bernoulle Pick-up Device", Balder and Cachon.

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