Process for production of quaternary ammonium hydroxides

Details Process for production of quaternary ammonium hydroxides Process for production of quaternary ammonium hydroxides

1987-11-12

1988-10-11

Andrews, R. L.

Chemistry: electrical and wave energy

Processes and products

204 73R, C25C 100

Patent

active

047769297

ABSTRACT:
A process for production of high purity quarternary ammonium hydroxides, comprising electrolyzing quarternary ammonium hydrogencarbonates represented by the general formula: ##STR1## (wherein the symbols are as defined in the appended claims) in an electrolytic cell comprising an anode compartment and a cathode compartment defined by a cation exchange membrane. In accordance with this process, high purity quarternary ammonium hydroxides can be produced with high electrolytic efficiency and further without causing corrosion of equipment. Since the quarternary ammonium hydroxides produced by the present invention are of high purity, they can be effectively used as, for example, cleaners, etchants or developers for wafers in the production of IC and LSI in the field of electronics and semiconductors.

REFERENCES:
patent: 4326932 (1982-04-01), Froling et al.

Affiliated with

Also associated with

Rating

Process for production of quaternary ammonium hydroxides does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for production of quaternary ammonium hydroxides, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for production of quaternary ammonium hydroxides will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1956601